Chao, Shiuh    (       )

 

 

Professor

 

Institute of Photonics Technologies/E.E. Dept. National Tsing Hua Univ.       清大光電所/電機系

 

Ph.D. The University of Texas at Austin, 1981

 

Optical Storage, Optical Thin Film, Nonlinear Optical Materials and Waveguides, Photonics Crystals and LED, Silicon Photonics

Email: schao@ee.nthu.edu.tw

 

 

Prof. Chao received BS degree in physics from National Tsing Hua University in 1976, MS degree in physics from Northeastern University in 1978, and Ph.D. degree in materials science and engineering from The University of Texas at Austin in 1981. He worked for Optical Memory Group, Borroughs Corp. USA from 1981 to 1983 and Ring Laser Gyro Group, Electronics Division of Northrope Corp. USA from 1983 to 1984. He joined faculty member of E.E. Dept. National Tsing Hua University in 1984. He was visiting scientist of Research Laboratory of Eastman Kodak Co. USA from 1994-1995, visiting scholar of Ginzton Laboratory, Stanford University USA in 1999. His primary research interests since the beginning of his research career till present are in photonics materials and devices which include: (1) Optical storage material for magneto-optical disk and write once disk. (2) Optical thin film materials for low scatter laser mirror in ring laser gyroscope. (3) Periodic poling for quasi-phase-matching (QPM) nonlinear optical materials and QPM devices for blue light generation. (4) Nonlinear glass waveguide. (5) One dimensional and three dimensional photonic crystals. (6) Photonics crystal for light extraction enhancement of GaN-LED. (7) Silicon photonics, particularly high speed microring silicon optical modulator. (8) Low mechanical loss thin films for laser interference, gravitational wave detector.He pioneered the optical disk R&D in Taiwan, R.O.C. He has developed the first 3.5'' 248MB magneto-optical disk in Taiwan with OESL-ITRI, and received Technical Contribution Award from The Chinese Society of Optical Engineering in 1992 for his achievement. He developed low scatter laser mirror for ring laser gyroscope that made significant contribution to national ring laser gyro project.

 

Recent Journal Publications

 

 

1.      H. M. Ku ,C. Y. Huang, Shiuh Chao “Fabrication of three dimensional auto-cloned photonic crystal on sapphire substrate” Applied Optics, Vol.50, No.9, March (2011).

2.      H. M. Ku , C. Y. Huang, C. Z. Liao, Shiuh ChaoEpitaxial Lateral Overgrowth of Gallium Nitride for Embedding the Micro-Mirror Array” Japanese Journal of Applied Physics,Vol.50, 04DG07 (2011).

3.      S. Y. C. Lee , Shiuh ChaoDesign of a Dual-Wavelength Optical Head for Submicron-scale and Nano-scale Lithography” IEEE trans. Magnetics, Vol.47, No.3, March(2011).

4.      C. Y. Huang, H. M. Ku, Chen-Zi Liao, and Shiuh Chao “MQWs InGaN/GaN LED with embedded micro-mirror array in the epitaxial-lateral-overgrowth gallium nitride for light extraction enhancement”, Optics Express , 18, 10674–10684, (2010)

5.      Chih T’sung Shih , Zhi Wei Zeng , Shiuh Chao “Design and Analysis of MOS-capacitor Microring Optical Modulator with SPC Poly-silicon Gate” Journal of Lightwave Technology, Vol. 27, pp. 3681-3873, September (2009).

6.      C. Y. Huang , H. M. Ku, and S. Chao, “Light extraction enhancement for InGaN/GaN LED by three dimensional auto-cloned photonics crystal,” Optics Express, 17, pp.23702–23711, (2009).

7.      C. Y. Huang, H. M. Ku, W. T. Liao, C. L. Chao, J. D. Tsay, and S. Chao, “Heat resistive dielectric multi-layer micro-mirror array in epitaxial lateral overgrowth gallium nitride,” Optics Express, 17, 5624–5629, (2009)

8.      Chih T’sung Shih and S. Chao ,”Spectral shift by half free-spectral-range for microring resonator employing the phase jump phenomenon in coupled-waveguide and application on all-microring wavelength interleaver,” Optics Express, 17, 7756-7770, (2009)

9.      C. Y. Huang, H.M. Ku, and S. Chao “Surface profile control of the auto cloned- photonic-crystal by ion-beam-sputter deposition with RF-bias etching” Applied Optics, Vol. 48, No.1, 69-73, Jan. 2009.

10.  Chih T’sung Shih, Zhi Wei Zeng , Yin Cheng Chang , Shiuh Chao” Optical Design of Bent Rib Waveguide with MOS Cross-section” Optical Review, vol.4, pp.413-415, 2009

11.  C.Y. Huang , H.M. Ku, Y. P. Tsai, W. K. Chen, and S. Chao, "Refractive index variation of amorphous Ta2O5 film fabricated by ion beam sputtering with RF bias power," Optical Review, vol. 16, pp. 274-275,2009.

12.  Chih T’sung Shih, Shiuh Chao “Simplified numerical method for analyzing TE-like modes in 3-D circularly bent dielectric rib waveguide by solving two 1-D eigenvalue equations” Journal of the Optical Society of America B. Vol.25, No.6, 1031-1037, June, 2008

13.  Huai-Yi Chen , Feng-Fan Chang, Jia-Cheng Liao, Shiuh Chao, “ Humidity effect on the decay of second-order nonlinearity in thermally poled fused silica”, Optics Express, Vol.14, pp.12334-12340, Dec. 2006.

14.  Chien-Chung Hung , M.J. Kao, Y.S. Chen, Y.H. Wang, Y.J. Lee, W.C. Chen, W.C. Lin, K.H. Shen, K.L. Chen, S. Chao, D. D.-L. Tang, and M.-J. Tsai, “A 6F2 bit cell design based on 1T2UMTJ structure and low power design for MRAM,” IEEE Trans. Electron Devices, vol.53,no.7, 1530-1538, July, 2006.

15.  Chien-Chung Hung , Y.J. Lee, M.J. Kao, Y.H. Wang, R.F. Huang, W.C. Chen, Y.S. Chen, K.H. Shen, M.-J. Tsai, W.C. Lin, D. D.-L. Tang, and S. Chao, “Wide operation margin of toggle mode switching for magnetic random access memory with preceding negative pulse writing scheme,” Appl. Phys. Lett., vol. 88 , pp. 112501.1-112501.3, Mar. 2006.

16.  Shiuh Chao, Yu-Hsien Yang, Huai-Yi Chen, Ze-wen Wang “ Quasi-Phase-Matching Second-Harmonic-Generation in Ge-Implanted Fused Silica Channel Waveguide”, Optics Express, vol. 13, pp.7091-7096, 2005

17.  Huai-Yi Chen,Chun-Lin Lin, Yu-HsienYang, and Shiuh Chao, Huan Niu,Chih T’sung Shih “Creation of second-order nonlinearity and quasi-phase-matched second-harmonic generation in Ge-implanted fused silica planar waveguide”, Applied Physics Letters, 86, 081106, 2005.

18.  Shiuh Chao, Tzu-Kai Wang “Graphical Method and Numerical Analysis on PeriodicStratifiedThin Film Omni-reflector” Applied Optics, 44, 17, 2005.

19.  G. Dyankov, H.Y. Chen, Shiuh Chao, S. Chi “Optimization of second harmonic generation in nonlinear film structure”, Optics Communications, 236, 203-208, 2004.

20.  Jiayu Liu, Shiuh Chao “ Simple Design Method for Thin Film Dispersion Compensator,”Applied Optics, Vol.43, No.17, 3442-3448, June, 2004.

21.  C.C. Hung, M.J. Kao, W.C.Lin, S.Chao, D. Tang, M.-J. Tsai “ Low Writing Current Magnetoresistive Random Access Memory (MRAM) with Side Metal Pillar Write Word Line (PWWL)” Journal of Magnetism and Magnetic Materials, Vol. 282, pp.373-379, 2004.

22.  Huai-Yi Chen, Jin-Sheng Sue, Yi-Hsuan Lin, Chin-Shun Tsai, Pao-Tung Wu, Shiuh Chao”Thermal poling and ultraviolet erasure characteristics of type-III ultravioletgradefused silica and application to periodic poling on planar substrates” Journal of Applied Physics. Vol.94, No. 4, 1531-1538,Aug. 15, 2003.

23.  Huai-Yi Chen, Jin-Sheng Sue, Yi-Hsuan Lin, Shiuh Chao “Quasi-Phase-Matched Second-Harmonic-Generation in UV-assisted Periodically Poled Planar Fused Silica” Optics Letters. Vol. 28, No. 11, 917-919, June 1st, 2003.

24.  Shiuh Chao, Wen-Hsiang Wang, Cheng-Chung Lee "Low loss dielectric mirror with ion beam sputtered TiO2-SiO2 mixed films" Applied Optics. Vol.40, No.13, 2177-2182, May 1, 2001.

 

Recent International Conference

 

 

1.        Shiuh Chao, Ling-Chi Kuo, Shun-Jin Wang, Howard Pan, Sin-Jhong Song, Yu-Hang Juang, Innocenzo Pinto, Riccardo Desalvo, “Thickness-dependent crystallization on thermal anneal for the titania/silica nano-layers deposited by ion-beam-sputter method” LIGO-Virgo Collaboration Meeting, Hanover, Germany, Sep.23-27, 2013. LIGO documentation number: LIGO-G1300921.  

2.        Shiuh Chao, Howard Pan, Chia-wei Lee, Ling-chi Kuo, “mechanical loss of silicon nitride films grown by plasma-enhanced chemical vapor deposition (PECVD) method” LIGO-Virgo Collaboration Meeting, Washington D.C., USA, Mar.18-22, 2013. LIGO documentation number: LIGO-G1300171.  

3.        I.M. Pinto, V. Pierro, R. DeSalvo , S. Chao, J. Wang, H. Pan ,”Interdiffused Coatings ” LIGO-Virgo Collaboration Meeting, Rome, Italy, Sep.10-14, 2012. LIGO documentation number: LIGO-G1200976  

4.        Riccardo DeSalvo, Innocenzo Pinto, Shiuh Chao, et al. ,”A method to determine coating’s Young’s modulus from frequency shift of silicon cantilevers”, LIGO-Virgo Collaboration Meeting, Rome, Italy, Sep.10-14, 2012. LIGO documentation number: LIGO-G1200938.  

5.        Shiuh Chao, Jeng-shiun Ou,Vincent Huang, Julie Wang, Steve Wang, Howard Pan, Chia-Wei Lee, Riccardo DeSalvo, Innocenzo Pinto ”Progress of coating development at NTHU”, LIGO-Virgo Collaboration Meeting, Rome, Italy, Sep.10-14, 2012. LIGO documentation number: LIGO-G1200849.  

6.       H. M. Ku, C. Y. Huang, C. Z. Liao, and S. Chao, “Epitaxial Lateral Overgrowth of Gallium Nitride for Embedding the Micro-Mirror Array,” International Conference on Solid State Devices and Materials, Tokyo, Japan (2010) (oral presentation).

 

7.        C. Y. Huang, H. M. Ku, and S. Chao, “Fabrication of three dimensional auto-cloned photonics crystal on sapphire substrate,” OSA Optical Interference Coatings Conference, Tucson, USA (2010), (oral presentation).

 

8.        S. Chao, C. Y. Huang, and H. M. Ku, “LED-fabrication independent light extraction enhancement structure on back-side of sapphire substrate with large area auto-cloned photonics crystals,” OSA Solid State and Organic Lighting, Karlsruhe, Germany (2010), (oral presentation). 

9.        Chih T’sung Shih, and Shiuh Chao, “Active critical coupling control on a single-arm silicon microring by free-carrier absorption”, 15th Optoelectronics and Communications Conference (OECC), 2010, Sapporo, Japan. 

10.      Chih T’sung Shih, Zhi Wei Zeng, and Shiuh Chao., “Temperature stability of a CMOS-compatible single-arm microring optical filter with MOS cross-section” Integrated Photonics and Nanophotonics Research and Applications (IPNRA), oral presentation in English, 2009, Honolulu, Hawaii, USA. (oral presentation)

 

11.      Chih T’sung Shih, Zhi Wei Zeng, and Shiuh Chao, “Extinction ratio compensation by free carrier injection for a MOS-capacitor microring optical modulator subjected to temperature drifting”, Conference on Lasers and Electro-Optics/Pacific Rim (CLEO/Pacific Rim), 2009, Shanghai, China.  

12.      Chih T’sung Shih, Yu Heng Tzeng, Zhi Wei Zeng, Yao-Jen Lee, and Shiuh Chao, “I-V characteristics of thin gate oxide on MOS structure with laser annealing on the poly-silicon gate,” The 15th Symposium on Nano Device Technology 2008 (SNDT), Hsinchu, Taiwan, 2008.  

13.      Chih T’sung Shih, Zhi Wei Zeng , Yin Cheng Chang , Shiuh Chao, “Optical design of bent rib waveguide with MOS cross-section,” The 6th International Conference on Optics-photonics Design and Fabrication (ODF), 2008, Taipei, Taiwan. (oral presentation)  

14.      C. Y. Huang, H. M. Ku, Y. P. Tsai, W. K. Chen, and S. Chao, “Refractive Index Variation of Amorphous Ta2O5 Film Fabricated by Ion Beam Sputtering with RF Bias Power,” International Conference on Optics-photonics Design & Fabrication, Taipei, Taiwan (2008). (oral presentation)

 

15.      C. Y. Huang, H. M. Ku, S. J. Hsu, C. W. Chu, and S. Chao, “Simulation of the Re-shaping Process for Auto-cloned Photonic Crystal,” OSA Optical Interference Coatings Conference, Tucson, USA (2007), (oral presentation).

 

16.      C. Y. Huang, C. T. Shih, and S. Chao, “Analysis on the wide-acceptance angle photonic crystal polarization beam splitter with saw-tooth structure for visible range,” International Union of Materials Research Societies, Taipei, Taiwan (2004).  

17.      C. C. Hung, S. Chao*, Y. H. Chen, Y. C. Peng, K. H. Shen, S. E. Lee, W. S. Chen,W. C. Lin**, M. J. Kao, D. Tang** and M.-J. Tsai “Low Writing Current Magnetoresistive Random Access Memory (MRAM) With Side Metal Pillar Write Word Line (PWWL)” IEDM, San Francisci, USA, 2004. (oral presentation)  

18.      Shiuh Chao, Huai-Yi Chen, Chun-Lin Lin, Yu-HsienYang, Huan Niu “Quasi-phase matched second-harmonic generation in thermally poled Ge2+- implanted silica glass planar waveguide” OECC-COIN 2004, Kawagoma, Japan, 2004.

 

 

 

 

 

Recent Patent                                                                      

 

 

 


類別

專利名稱

國別

專利號碼

發明人

專利權人

專利期間

國科會計畫編號

 

A

 

 

Optical Storage

System Employing a Mlti-Layer Optical

美國

 

 

 

4,451,91

4

 

趙煦 

Burrough

s Corp.

 

1984-2004

 

 

獲證

 

A

Optical Storage

美國

4,451,91

趙煦 

Burrough

1984-2004

獲證

 

 

System Employing a

 

5

 

s Corp.

 

 

 

 

Mlti-Layer Optical

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

A

Optical Recording

美國

5,177,73

趙煦 

Burrough

1984-2004

獲證

 

 

Using an

 

2

 

s Corp.

 

 

 

 

Agglomerating

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

A

Polarized Light

美國

5,381,23

趙煦 

工研院

1995-2012

獲證

 

 

Scatterometer for

 

3

 

 

 

 

 

 

Measuring the

 

 

 

 

 

 

 

 

Thickness of a Film

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

A

Apparatus for

美國

5,382,34

趙煦 

工研院

1995-2012

獲證

 

 

Coating a

 

5

 

 

 

 

 

 

 

 

 

 

 

 

 

 

A

一種量測鍍在部份基

版表面之薄膜厚度的

偏極化散射儀以及其

量測方法

本國

075155

趙煦 

工研院

1995-2012

獲證

 

 

 

 

 

 

 

 

 

 

A

俱低損耗之光學混合

膜及反射鏡

本國

413743

趙煦 

國立清華

大學

1999-2019

獲證

 

 

 

 

 

 

 

 

 

 

A

干涉濾波片

本國

520447

趙煦 

國立清華

大學

2003

獲證

 

 

 

 

 

 

 

 

 

 

A

Electro-optical

modulator with

美國

US

7,447,38

趙煦、石

志聰等

工研院

2009-2029

獲證,獲工研院優質專利獎

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

A

Electro-optical

modulator with

本國

TW

9513253

趙煦、石

志聰等

工研院

2009-2029

獲證

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

B

Optoelectronics

device having

本國

M376052

趙煦、楊

淑媚等

工研院

2010-2019

獲證

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

A

發光二極體及其製造方

美國

US

7,663,15

黃承揚;

浩民 趙煦

清華大學

工研院

2010-2030

獲證